摘要
Microelectromechanical system(MEMS)pressure sensors based on silicon are widely used and offer the benefits of miniaturization and high precision.However,they cannot easily withstand high temperatures exceeding 150 ℃ because of intrinsic material limits.Herein,we proposed and executed a systematic and full-process study of Sic-based MEMS pressure sensors that operate stably from-50 to 300 ℃.First,to explore the nonlinear piezoresistive effect,the temperature coefficient of resistance(TCR)values of 4H-SiC piezoresistors were obtained from-50 to 500 ℃.A conductivity variation model based on scattering theory was established to reveal the nonlinear variation mechanism.Then,a piezoresistive pressure sensor based on 4H-SiC was designed and fabricated.The sensor shows good output sensitivity(3.38 mVN/MPa),accuracy(0.56%FS)and low temperature coefficient of sensitivity(TCS)(-0.067%FS/℃)in the range of-50 to 300 ℃.In addition,the survivability of the sensor chip in extreme environments was demonstrated by its anti-corrosion capability in H_(2)SO_(4) and NaOH solutions and its radiation tolerance under 5 W X-rays.Accordingly,the sensor developed in this work has high potential to measure pressure in high-temperature and extreme environments such as are faced in geothermal energy extraction,deep well dilling,aeroengines and gas turbines.
基金
support from National Natural Science Foundation of China(No.52175517,51720105016)
Zhejiang Lab(2022MG0AB03)
China Postdoctoral Science Foundation(No.2017M610634)
The Recruitment Program of Global Experts(Grant No.WQ2017610445)
Innovation Capability Support Program of Shaanxi Province(No.2021TD-23).
