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小功率同轴KrCl准分子灯辐射特性研究 被引量:2

Radiant Characteristics of Low Power Coaxial KrCl Excilamps
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摘要 本文研究了小功率正弦电源驱动的外径40 mm的准分子灯在气隙2.5~8.5 mm、气压50~600 mbar、氯含量0.1%~0.9%、频率7.9~11.8 kHz、输入功率10~150 W等5个参数范围内KrCl准分子灯的光电特性。结果表明,在输入功率48.3 W时,最佳辐射效率为3.3%,对应4.5 mm气隙、混合气体气压250 mbar、氯含量在0.1%。 In this paper,the electrical and radiant characteristics of KrCl excilamp with an outer diameter of 40 mm driven by low-power sinusoidal power supply are studied in the range of five parameters,such as discharge gap 2.5~8.5 mm,gas pressure 50~600 mbar,chlorine content 0.1%~0.9%,frequency 7.9~11.8 kHz and input power 10~150 W.It is found that the best radiation efficiency is 3.3%with input power 48.3 W and optimal parameters of 4.5 mm discharge gap,mixed gas pressure 250 mbar and chlorine content 0.1%.
作者 刘超群 曹露泽 朱倩文 韩秋漪 张善端 LIU Chaoqun;CAO Luze;ZHU Qianwen;HAN Qiuyi;ZHANG Shanduan(Academy for Engineering&Technology,Fudan University,Shanghai 200433,China;Institute for Electric Light Sources,Fudan University,Shanghai 200438,China)
出处 《照明工程学报》 2023年第2期6-11,共6页 China Illuminating Engineering Journal
关键词 氯化氪 准分子灯 介质阻挡放电 222 nm辐射 KrCl excilamp dielectric barrier discharge 222 nm radiation
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