摘要
讨论了薄膜和镀层力学性能的测试方法 ,包括布里渊散射、表面声波、声显微术及微压入方法。前三种方法是非接触法 ,最后一种是接触法。声学方法可测量弹性系数的各个分量 ,在薄膜和镀层情况下这些系数是和大块试样不同的 ,在弹性各向异性情况下可测出对应某个特定方向的弹性系数。微压入法只能测量各向同性的薄膜和镀层 ,但它还能测量若干塑性以至断裂的行为。最后 ,根据弹塑性理论进行的计算机数字模拟可以给出各种应力应变状态下的力学性能。
The testing methods of mechanical properties of the thin films and coatings are discussed. The methods include: Brillouin scattering, surface acoustic wave, acoustic microscopy and micro/nano indentation. The former three are non contacting while the latter is contacting methods. The three acoustic methods give possibilities to measure all components of elastic constants for films and coatings which are different from those constants of bulk materials. Even in the case of anisotropy of elasticity, the specific elastic constants for definite directions can be obtained. As for the micro/nano indentation, it gives not only the elastic properties of isotropic films and coatings but also their plastic and fracture behavior. Finally, computer simulation based on the elastic plastic theory allows for complete determination of mechanical properties in any state of stress and strain.
出处
《理化检验（物理分册）》
CAS
2002年第11期473-477,481,共6页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
