摘要
针对新设计的等截面反射镜椭圆压弯机构在固定物距(即反射镜在光路中位置不变)的情况下,研究了实现大范围像距调整(即样品位置发生改变)时镜面面形误差等问题。通过理论分析并借助有限元分析软件计算等截面平面镜压弯至不同(反射点处像距不同)椭圆柱面时的理论斜率误差,最后对椭圆压弯机构样机进行了实际压弯测试。实验结果与计算分析均表明:保持物距、掠入射角不变,压弯镜面与理想椭圆柱面之间的斜率误差会随着像距的减小而增大,并且像距越小,镜面斜率误差的增加速度越大。实验测得在反射镜面初始斜率误差为0.397μrad的情况下,全部像距范围(21.5~3.8 m)内压弯镜面的实际斜率误差在0.402~0.560μrad之间,重复精度为0.051μrad,均满足上海光源光束线的设计要求。本文研究证明了使用等截面反射镜压弯机构进行椭圆柱面压弯可以实现聚焦镜工作像距在大范围内的连续调节。
In this paper,the surface shape error of latest elliptical bending mechanism with a constant crosssection mirror is studied when the object distance is fixed(when the position of the mirror in the light path is invariable)and the image distance is adjusted drastically(when the position of the sample is changed).Based on theoretical analysis and the finite element analysis,theoretical slope error is calculated when it is caused by bending a mirror with a width equal to an elliptical cylinder with a different shape(different image distances at the reflection point).Then,a bending experiment of a prototype of the elliptical bending mechanism is conducted.Experimental results and analysis indicate that the slope error between the bending mirror and an ideal elliptic cylinder will increase with a decrease in image distance,and the slope error of the mirror will increase more quickly as the image distance is shortened.When the initial slope error of the reflecting mirror is 0.397μrad,the slope error of the bent mirror in the whole range of image distance(21.5~3.8 m)is 0.402~0.560μrad and the repeatable accuracy is 0.051 urad,which meets the design requirements of the beamline of the Shanghai Synchrotron Radiation Facility(SSRF).It is proven that in elliptically bending mirrors,continuous adjustment of the image distance from the focusing mirror can be achieved by using a bending mechanism with constant cross-section mirror.
作者
周博文
王楠
祝万钱
薛松
田应仲
ZHOU Bo-wen;WANG Nan;ZHU Wan-qian;XUE Song;TIAN Ying-zhong(School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 201900,China;Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201204,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China)
出处
《中国光学》
EI
CAS
CSCD
北大核心
2020年第4期778-786,共9页
Chinese Optics
基金
国家自然科学基金资助项目(No.11675253)。
关键词
同步辐射
压弯机构
椭圆柱面镜
面形误差
synchrotron radiation
bending mechanism
elliptical cylindrical mirror
slope error
