摘要
溅射薄膜压敏芯体是制作薄膜压力传感器的核心敏感器件,测量精度高、长期稳定性好,尤其适合航天、航空等对可靠性、长寿命要求高的军事领域应用。对薄膜压敏芯体制备工艺过程进行分析,探讨影响芯体长期稳定性的原因,针对原因进行工艺改进,可获得高稳定的薄膜压敏芯体。
Sputtering thin film pressure sensitive element is the core sensitive device for making thin film pressure sensor.It has high measurement accuracy and long term stability,especially suitable for military applications such as aerospace and aviation which require high reliability and long life.The preparation process of the thin film pressure sensitive element is analyzed,and the reasons that affect the long term stability of the element are discussed.High stable film pressure sensitive element can be obtained by improving the process.
作者
何迎辉
石慧杰
金忠
谢锋
周国方
HE Yinghui;SHI Huijie;JIN Zhong;XIE Feng;ZHOU Guofang(The 48th Research Institute of CETC,Changsha 410111,China;Hunan Provincial Key Laboratory of Defense Science and Technology of Thin Film Sensor Technology,Changsha 410111,China)
出处
《电子工艺技术》
2020年第4期215-217,共3页
Electronics Process Technology
关键词
溅射薄膜
薄膜压力传感器
压敏芯体
长期稳定性
sputtering thin film
thin film pressure sensor
sensitive element
long term stability
