摘要
六氟丁二烯是一种新型的含氟电子气体,具有优异的蚀刻性能,且更加环保。简述了六氟丁二烯的物理性质、蚀刻特点和产品规范,详细介绍了国内外六氟丁二烯纯化技术的进展。
Hexafluoro-1,3-butadiene is the next generation fluorine-containing electronic gases. It has great etching performance and is much more environment friendly. Herein, the physical properties, etching features and product specifications were introduced, the development of international and domestic purification technology was discussed in details.
作者
李瑜哲
张智勇
艾波
吴高胜
许保云
LI Yuzhe;ZHANG Zhiyong;AI Bo;WU Gaosheng;XU Baoyun(Shanghai Research Institute of Chemical Industry Co.,Ltd.,Shanghai 200062,China;Shanghai 3F New Material Co.,Ltd.,Shanghai 200241,China)
出处
《有机氟工业》
CAS
2020年第2期25-29,52,共6页
Organo-Fluorine Industry
关键词
六氟丁二烯
蚀刻
纯化
性质
进展
hexafluoro-1,3-butadiene
etching
purification
property
develpoment
