摘要
运用脉冲直流磁控溅射的方法在刀具硬质合金表面制备TiAlSiN复合涂层,实验测试N2流量对刀具硬质合金表面磁控溅射TiAlSiN涂层组织和摩擦性的影响。研究结果表明:TiAlSiN涂层出现TiSiN和AlN衍射峰。当N2浓度很高时,可以对晶粒生长起到阻碍作用,从而获得更加致密的组织结构。当设定较小N2流量时,涂层获得了最高硬度;当N2流量到达100 mL/min时,硬度提高到25.2 GPa,弹性模量保持稳定。随着N2流量的增加,涂层残余应力表现出增加,涂层结合力表现为先增大后减小。随着N2流量的增加,涂层摩擦系数表现出增加,磨损率表现出减小。在N2流量100 mL/min条件下,摩擦系数到达最大值0.55,磨损率到达最小值2.12。设定较低的N2流量,生成许多磨屑,形成犁沟;设定更高的N2流量,表现出更好的耐摩擦磨损性能。
Herein,we addressed the surface modification of carbide with TiAlSiN coatings,synthesized by pulsed DC magnetron sputtering.The influence of N2 flow-rate on the microstructures and tribological properties was investigated with X-ray diffraction,scanning electron microscope,and conventional mechanical probes.The results show that the N2 flow-rate had a major impact.To be specific,as the N2 flow-rate increased from 40 mL/min to 100 ml/min,the size of columnar grain and residual stress decreased,resulting in an increasing compactness,the hardness and interfacial adhesion changed in a decrease-increase mode,accompanied by a stable elastic modulus.Deposited at 100 mL/min,the hardness increased to a peak of 25.2 GPa,the friction coefficient increased to a maximum of 0.55,and the wear-rate decreased to a minimum of 2.12.The low(high)N2 flow-rate accounted for the major abrasive(adhesive)wear-mechanism of the TiAlSiN coatings,because of the increased compactness and hardness.
作者
田伟华
张松锋
Tian Weihua;Zhang Songfeng(School of Automotive and Mechanical-Electrical Engineering,Zhoukou Vocational and Technical College,Zhoukou 466000,China;School of Mechanical and Electrical Engineering,Zhoukou Normal University,Zhoukou 466000,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2020年第5期427-431,共5页
Chinese Journal of Vacuum Science and Technology
基金
“纳米晶-非晶复合超硬涂层在切削刀具中的应用研究”河南省科技发展计划项目(162102310592)。
