摘要
基于钝化发射极和背面接触(PERC)太阳电池工艺,对选择性发射极晶体硅双面PERC太阳电池背面效率及双面率优化进行了研究。采用等离子体增强化学气相沉积(PECVD)设备,制备了背面为AlOx/SiNx钝化膜层的双面PERC太阳电池。提出了几种不同背面钝化膜层的设计方案,分析了不同设计方案对双面PERC太阳电池背面效率及双面率的影响。测试结果表明,采用背面AlOx/SiNx叠层钝化膜、SiNx双层减反射膜、较大折射率梯度SiN_x膜层、较薄AlOx膜层及较薄SiNx膜层工艺,对提升双面PERC太阳电池背面效率及电池双面率效果显著,用最优设计方案制备的双面PERC太阳电池,其背面效率和双面率分别为14.96%和68.69%。
Based on the passivated emitter and rear contact(PERC) solar cell process, the rear side efficiency and bifaciality optimization of selective emitter crystalline silicon bifacial PERC solar cells were studied. Plasma enhanced chemical vapor deposition(PECVD)equipment was used to produce bifacial PERC solar cells with back-coated AlOx/SiNx passivation. Several designs of passivation film on the rear side were proposed, and the influences of different design schemes on the rear side efficiency and the bifaciality of the bifacial PERC solar cell were analyzed. The test results show that the processes of back-coated AlOx/SiNx stack passivation film, the SiNx double-layer anti-reflection coatings, the SiNx film with higher refractive index gradient, the thinner AlOx and SiNx films are effective for improving the rear side efficiency and the bifaciality of the bifacial PERC solar cell. The rear side efficiency and the bifaciality of the bifacial PERC solar cell fabricated by using the optimal design scheme are 14.96% and 68.69%, respectively.
作者
孙晓凯
田凤美
靳迎松
张福庆
胡明强
Sun Xiaokai;Tian Fengmei;Jin Yingsong;Zhang Fuqing;Hu Mingqiang(JA Solar Co.,Ltd.,Xingtai 055550,China)
出处
《半导体技术》
CAS
北大核心
2020年第4期312-316,共5页
Semiconductor Technology
关键词
双面钝化发射极和背面接触(PERC)太阳电池
背面效率
双面率
背钝化
双面减反射膜
bifacial passivated emitter and rear contact(PERC)solar cell
rear side efficiency
bifaciality
rear passivation
double-layer anti-reflection coating
