摘要
基于电解加工电极不损耗的优势,研究了一种微细电解加工微流控芯片注塑模具微结构的工艺,针对微小V型槽和微孔,解决微细电极在线制备和测量、微结构成形精度、群微结构加工等关键问题。加工实验结果表明:该工艺可实现曲线V型槽和群微结构加工,通过微细电解加工的模具具有较高的形状精度和表面质量。
Based on the advantage of no electrode loss of electrochemical machining(ECM),a micro-structure process of microfluidic chip injection mold for micro ECM was studied,then key issues such as online preparation and measurement of micro-electrodes and the precision of microstructure formation were solved for micro V-grooves and micro-holes.The processing experiments show that the process can realize the curved V-groove and group microstructure processing,and the mold processed by the micro-electrolysis has high shape precision and surface quality.
作者
王志强
钟昊
李勇
佟浩
孔全存
WANG Zhiqiang;ZHONG Hao;LI Yong;TONG Hao;KONG Quancun(Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control,Department of Mechanical Engineering,Tsinghua University,Beiing 100084,China;State Key Laboratory of Tribology,Tsinghua University,Beijing 100084,China)
出处
《电加工与模具》
2019年第6期33-36,60,共5页
Electromachining & Mould
基金
国家自然科学基金资助项目(51775302)
天津市自然科学基金重点项目(17JCZDJC32300)
