摘要
运用空心阴极离子镀工艺在M_2钢表面沉积了(Ti,Al)N涂层,并应用SEM,XRD,TEM和XPS等方法分析了(Ti,Al)N涂层的组织结构和组份。结果表明,(Ti,Al)N为面心立方结构,其组织呈细柱状晶,晶粒平均尺寸小于0.1μm。在(Ti,Al)N组织表面有一层TiO_2氧化膜,膜厚为50nm;在(Ti,Al)N与基体界面存在一过渡层,其组成为:a-Ti和FeTi相。
(Ti, Al)N coating is deposited on the surface of M2 high speed steel(HSS) by using hollow cathode discharge ( HCD)deposition process. The microstructure and component depth profiles of(Ti, Al)N coating is investigated by means of scanning electroa microscopy(SEN), X-ray diffraction(XRD), transmission electron microscopy(TEM)and X-ray photoelectron spectroscopy(XPS). The results show that the face centred cubic structure and fine columnar crystal microstructure of(Ti, Al)N phase are detected with an average grain size of less than 0.1μm.A TiO_2 oxide film of 50nm is formed on the surface of(Ti, Al)N microstructure. There is a transition layer at the interface between(Ti, Al)N and matrix, which is a-Ti and Fe phases.
出处
《表面技术》
EI
CAS
CSCD
1992年第5期208-211,共4页
Surface Technology
关键词
高速钢
涂层
钛
铝
镍
high speed steel
(Ti.Al)N coating
surface analysis
