摘要
通过磁控溅射离子镀方法(MSIP)对高速钢W18Cr4V进行镀TiN膜,采用D/MAX-ⅢB型X射线衍射仪、膜厚测量仪、HV-1000显微维氏硬度计、LKDM-2000型摩擦磨损仪和S-3000N型扫描电子显微镜对经表面改性过的试样组织、膜厚、硬度和耐磨性进行研究,并对镀膜时间、氮分压和溅射电流等工艺参数对TiN涂层的组织、厚度、硬度和耐磨性的影响进行分析。确定了镀膜层综合性能最好的工艺方案。
TiN coatings were deposited by magnetron sputter ion plating （MSIP） on the surface of high-speed steel W18Cr4V. The microstructure, coating thickness, micro-hardness and wear resistance of surface modification sample were investigated by the D/MAX-IIIB XRD tester, the coating thickness tester, the HV-1000 micro-sclerometer, the LKDM-2000 friction and wear tester, the S-3000N SEM. The influence of sputtering time, N2 partial pressures and sputtering current on the microstructure, coating thickness, micro-hardness and wear resistance of TiN coatings were also analysed. The technologic scheme of synthesizing best performance sputtering coatings was established.
出处
《热加工工艺》
CSCD
北大核心
2009年第16期104-106,共3页
Hot Working Technology
