摘要
在检测系统中,有效的被测信息提取方法是保证检测具有高精度和高效率的主要因素之一。本文提出了大量规则图形傅里叶频谱信息的有效提取方法——频谱点能量包络处理方法,为实现大量规则图形尺寸的高精度和高效率的检测奠定了理论基础。文中还就该方法的应用领域进行了展望。
The efficient method for collecting trie information to be measured is one of the main factors that ensure the measuring system with high precision and efficiency.In this paper,the method for collecting the information of Fourier transform spectrum(FTS) for regular patterns,i.e.,the envelope processing method of the intensities of FTS for regular patterns,is proposed.It lays a theoretical foundation for measuring the sizes of regular patterns with high precision and efficiency.In the end,the field to which the method can be applied is predicted.
出处
《北京航空航天大学学报》
EI
CAS
CSCD
北大核心
1992年第2期25-29,共5页
Journal of Beijing University of Aeronautics and Astronautics
关键词
傅里叶变换
包络处理
CCD
Fourier transform,envelope processing,CCD.
