摘要
采用化学气相沉积法(CVD)制备大尺寸ZnS晶体(CVD-ZnS),利用扫描电子显微镜、透射电子显微镜、X射线衍射分析对CVD-ZnS内部的胞状结构进行表征,表明胞状生长现象能改变CVD-ZnS材料内部的晶粒生长方向、分布方式,但对材料内部的物相、元素分布并未造成显著影响;通过对胞状物密集区的光学均匀性检测,分别为2.71×10^-5和2.85×10^-5,均方根值分别为6.46×10^-6和4.98×10^-6,正常区域的样品光学均匀性为9.53×10^-6,均方根值为1.51×10^-6,表明胞状物的存在会降低CVD-ZnS材料的光学均匀性;采用三点弯曲法测试材料弯曲强度,四组弯曲强度数据表明CVD-ZnS正常区的弯曲强度明显高于CVD-ZnS胞状物密集区。
Large-size ZnS crystals(CVD-ZnS)were prepared by chemical vapor deposition(CVD).The cellular structure in CVD-ZnS was characterized by scanning electron microscopy(SEM),transmission electron microscopy(TEM)and X-ray diffraction analysis(XRD),showing that growth direction and distribution mode of grains were changed by cellular structure.However,it has no significant effect on the phase,element distribution.Detection of optical homogeneity was implemented in dense areas of cellular matter and normal areas,optical homogeneity is respectively 2.71×10^-5,2.85×10^-5 and 9.53×10^-6,root mean square value is respectively 6.46×10^-6,4.98×10^-6 and 1.51×10^-6,indicating the existence of cytoplasm can reduce the optical uniformity of CVD-ZnS materials.The bending strength of materials was measured by three-point bending method,four groups of bending strength data shows that the bending strength of CVD-ZnS normal zone was significantly higher than that of CVD-ZnS cell-dense zone.
作者
杨海
魏乃光
杨德雨
李红卫
霍承松
黎建明
李冬旭
杨建纯
史晶晶
郭立
YANG Hai;WEI Nai-guang;YANG De-yu;LI Hong-wei;HUO Cheng-song;LI Jian-ming;LI Dong-xu;YANG Jian-chun;SHI Jing-jing;GUO Li(GRIREM Guojing Advanced Material Co.,Ltd.,General Research Institute for Nonferrous Metals,Sanhe 065201,China;GRIREM Advanced Materials Co.,Ltd.,General Research Institute for Nonferrous Metals,Beijing 100088,China)
出处
《人工晶体学报》
EI
CAS
北大核心
2019年第7期1233-1239,共7页
Journal of Synthetic Crystals
