摘要
针对轴对称单晶硅非球面超精密磨削中砂轮选择的问题,依据单晶硅红外非球面透镜的结构特性,对几种典型碟片砂轮的结构特性和磨损特性进行分析,优选圆弧形金刚石砂轮作为垂直磨削法磨削单晶硅非球面透镜用砂轮。通过磨削加工实验,研究砂轮各性能参数对非球面磨削加工质量(表面粗糙度、表面形貌、亚表层损伤厚度、面形精度)的影响,优选出D64粒度金刚石砂轮为单晶硅非球面粗磨用砂轮,浓度号为C100、截面圆弧半径为6 mm、粒度为D3的金刚石砂轮作为单晶硅非球面精磨用砂轮。
To optimize wheel performance parameters for ultra-precision grinding aspherical surface of silicon, based on the structural properties of silicon infrared aspherieal lens, the structural properties and wear properties of some kinds classic disc type wheels were analyzed, and the arc-shaped wheel was chosen to grind aspherieal surface of silicon. The grinding aspherical experiment was carried out, and the influence of wheel performance parameters on quality of aspherical surface was investigated. Finally, the D64 diamond wheel is chosen as coarse grinding wheel, the D3 wheel with concentrations number of C100 and critical section radius of 6 mm is chosen as fine grinding wheel.
出处
《兵器材料科学与工程》
CAS
CSCD
北大核心
2017年第4期5-10,共6页
Ordnance Material Science and Engineering
基金
湖南科技大学博士启动基金(E56118)
关键词
砂轮型式
砂轮性能参数
超精密磨削
优选
wheel type
wheel performance parameters
ultra-precision grinding
optimization
