摘要
随着现代电子技术的发展,通信收发系统趋向小型化,对射频前端的环行器提出了小型化的迫切需求,微电子机械系统(MEMS)环行器与传统环行器相比具有尺寸小、精度高、功率高的优势。创新性地提出了一款基于MEMS工艺的可表面贴装使用的环行器,最终尺寸为6 mm×6 mm×2.6 mm,工作频率为14~18 GHz,器件损耗小于0.65 dB,隔离度大于18 dB,电压驻波比小于1.4,满足用户需求;与传统微带环行器相比,其具有精度高、一致性好、可批量化生产等特点,同时通过金属化通孔实现微波信号垂直传输,避免出现金丝/金带键合使用时的匹配复杂等难题,在通信和雷达收发组件领域有着广泛应用。
With the development of the modern electronic technology,the communication transceiver systems tend to be miniaturized,thus the size of the circulator in the RF front-ends is urgently required to be miniaturized.Compared with the conventional circulators,the micro-electromechanical system(MEMS)circulators have the advantages of small size,high precision and high power.A surface-mounted circulator based on the MEMS process was innovatively proposed.The final size of the circulator is 6 mm×6 mm×2.6 mm.The working frequency of the circulator is 14-18 GHz,then the insertion loss is less than 0.65 dB,the isolation is greater than 18 dB,and the voltage standing wave ratio is less than 1.4,satisfying the requirements of users.Compared with the traditional micro-strip circulator,the circulator has the characteristics of high precision,good consistency,mass production and so on.Besides,the circulator achieves the vertical transmission of microwave signals through metallized through-holes,avoiding the complicated matching problems in the utilization of the gold wire/strip bonding,and has wide application in the fields of communication and radar transmit-receive(TR)modules.
作者
汪蔚
翟晓飞
李倩
杨拥军
Wang Wei;Zhai Xiaofei;Li Qian;Yang Yongjun(The 13^th Research Institute , CETC, Shijiazhuang 050051,China)
出处
《微纳电子技术》
北大核心
2019年第8期631-635,共5页
Micronanoelectronic Technology
关键词
微电子机械系统(MEMS)
表面贴装
环行器
三维异质集成
小型化
micro-electromechanical system(MEMS)
surface-mount
circulator
three-dimensional heterogeneous integration
miniaturization
