摘要
对于阳极层霍尔离子源装置本身,宽能、大束流、低气耗及低污染等指标是新一代装置的研发方向。基于拓宽装置放电电压范围的考虑,针对装置现有结构,进行了三维数值仿真建模。在现有装置的结构设计基础上,对装置磁路及结构设计进行修改,从而实现了对装置工作性能的提高。改进后的阳极层霍尔离子源放电电压范围在原有基础上扩展了50%以上,放电电压上限可以达到3000Vo改进后的装置在高电压、低气压、小电流的放电条件下运行稳定,仿真结果对装置的实际加工制造具有一定参考意义。
The operation of anode layer Hall ion source was empirically approximated, mathematically modeled and numerically simulated in particle-in-cell and Monte-Carlo collision method for design optimization. The influence of the source structure and magnetic circuit on the discharge voltage range and stability was investigated. The simulated results show that the heightened magnetic field confinement makes the difference. To be specific, the modified magnetic field increases the discharge voltage range of the ion source by 50%, approaching an upper limit of 3000 V;and the newly-designed anode layer Hall ion source is capable of operating routinely and stably under the conditions of high voltage, low gas pressure and low current. We suggest that the simulated results be of some technological interest in design optimization and fabrication of anode layer Hall ion source.
作者
张帆
唐德礼
李平川
赵杰
金凡亚
Zhang Fan;Tang Deli;Li Pingchuan;Zhao Jie;Jin Fanya(Southwestern Institute of Physics, Chengdu Department of Enterprise, Chengdu 610207 ,China;Southwestern Institute of Physics, Engineering & Technical College of Chengdu University of Technology, Leshan 614000 ,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2019年第4期332-337,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(11775073)
四川省应用基础项目(2016TD0015,2017JY0041)
国防基础科研项目(JCKY2017205B014)
关键词
霍尔离子源
工作性能
数值仿真
结构设计
Hall ion source
Operation performance
Numerical simulation
Structural design
