摘要
激光等离子体极紫外光源中的碎屑问题影响极紫外光源的稳定性及光源输出效率。针对该问题,研究了磁场对Nd:YAG激光Sn等离子体特性及极紫外辐射特性的影响,并且在0.6 T的磁场作用下,对激光等离子体光源中产生的离子碎屑进行了详细的对比研究。结果表明,外加0.6 T磁场可以有效减缓离子碎屑;由于磁场的约束,发射光谱也比未加磁场前有明显增强,计算得到的同时刻的电子密度是未加磁场的2.5倍;同时,探测到的极紫外辐射光谱并未受到磁场的影响。
Debris from laser produced plasma(LPP)severely decreases the lifetime of extreme ultravioletoptics. In order to alleviate the effect of debris in extreme ultraviolet(EUV),the effects of an externalmagnetic field on the expansion dynamics of Sn plasma have been investigated with a Nd:YAG laser. Thecharacteristics of ions from Sn plasma,optical emission spectrum and the EUV emission have beenstudied by comparing with and without the effect of magnetic field. The results show the effectivelyreduction in the ion kinetic energies of the plume species with a modest magnetic field of 0. 6 T. Theemission shows significant enhancements of the spectral lines. The enhancement of 2.5 times in theelectron density is obtained in the presence of the magnetic field. The results also indicate that the EUVemission do not depend significantly on the effect of magnetic field.
作者
兰慧
LAN Hui(School of Physics and Information Engineering,Jianghan University,Wuhan 430056,Hubei,China)
出处
《江汉大学学报（自然科学版）》
2016年第3期240-245,共6页
Journal of Jianghan University：Natural Science Edition
关键词
激光等离子体
磁场
碎屑
电子密度
laser-produced plasma
magnetic field
debris
electron density
