摘要
提出了一种波面干涉与全息术结合制作的实时全息三波面干涉仪。可用于光学平面度,薄膜厚度的检测。与其它干涉仪相比,具有独特的优点。
Real-time holographic three wavefront interferometer combineing wavefront interference with holography has been proposed in this paper. The apparatus can be used for a number of pratical applications including the measurement of flatness for an optical flat. Thickness for transmissive or refective films. It has peculiar character comparing with other interferometers.
出处
《重庆大学学报（自然科学版）》
EI
CAS
CSCD
1991年第3期73-73,共1页
Journal of Chongqing University
关键词
干涉仪
全息
三波面
实时
interferometer
modulation
phase modulations
