摘要
论述了霍尔等离子体源的工作原理 ,讨论并测试了该源最佳的磁场及分布。本设计采用永久磁铁并利用极靴产生发散磁场 ,及沿轴向有较大梯度的磁场 。
The IAD technology (Ion assisted deposition) attractes more attention recently because of the advantages. The Hall accelerator for IAD was developed. It has small size ( 6cm), low energy (average energy 40-150eV), high beam current (200-1000mA), large uniformity (the uniform area > 50cm) and the compact construction. The design of the Hall accelerator and the optimum magnetic structure were presented. The permanent magnet was applied. The pole pieces were arranged to obtain the divergent magnetism and strong magnetism gradient along axial direction. The design gives us good results. The high discharge efficiency and low neutral loss were obtained. The Hall acceralater can work in low pressure 1×10 -2 -2×10 -2 Pa, low flowrates 5-10 SCCM stably.
出处
《核技术》
CAS
CSCD
北大核心
2002年第9期679-683,共5页
Nuclear Techniques
