摘要
讨论了离子注入机尘埃污染的原因 ,给出了用冷凝泵系统取代扩散泵系统的改造实践 ,并提出了预防维修措施以全面减少尘埃污染。
This paper discusses the causes of particle contamination in end station of ion implanter. A useful reformation that substitute CTI-CRYO pump system instead of oil diffusion pump system is reported. To reduce particle contamination effectively , it is important that execute preventive maintenance methods.
出处
《电子工业专用设备》
2002年第2期103-105,共3页
Equipment for Electronic Products Manufacturing
