摘要
本项研究目的是制作微型高精度铂薄膜热敏电阻器与集成电路配合,用于工业和科研中温度的精确测量。用高纯铂板作靶材,在玻璃基板上采用磁控溅射方法,制备成Pt薄膜热敏电阻,并在两端制作纯金电极。经测试表明,该Pt薄膜热敏电阻具备良好的线性度和灵敏度,电阻温度系数达到(或接近)3 850 ?06℃1。本工艺条件稳定,适合批量生产。
The micro Pt-film thermal resistors of high precision are developed to match the ICs for precise temperature measurement in industry and scientific research. Pt thin film was sputtered on glass substrates. Au electrodes were made on both terminals of the resistor. The test results show that the resistor exhibits excellent linearity and sensitivity and a TCR close to 3850 ?0–6℃–1. The technology suits for mass production.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2002年第9期9-10,共2页
Electronic Components And Materials
