摘要
介绍在聚酰亚胺基底上由溅射方法制备热敏薄膜的工艺条件对膜热敏特性的影响。合理的选择薄膜的制备工艺条件和热处理条件可以得到良好特性的热敏薄膜，其温度系数大于４５００ｐｐｍ／℃。
This paper introduced the effect of processing condition of fabricating thin-film themistor on thermal properties of film on polyimide substrate using sputtering.Thermal thin-film with good properties can be obtained by choosing rationally processing condition of fabricating thin-film and thermal treatment condition.The temperature coefficient of thin-film is more than 4500ppm/℃and it has good mechanical performance.
出处
《仪表技术与传感器》
CSCD
北大核心
1997年第8期22-24,40,共4页
Instrument Technique and Sensor
