摘要
为实现平面式大型微结构表面的快速测量,提出了一种螺旋式扫描测量方法。基于该方法的测量系统由x、y、z向直线运动平台、绕z轴旋转的直接驱动（DD）马达以及激光位移传感器组成,当移动x、y向平台使激光位移传感器的激光束与DD马达的旋转中心重合,并通过z向平台使激光位移传感器位于其测量范围内时,使x向平台与DD马达同步运动而形成螺旋线来获得被测表面形貌的平面位置信息,同时由激光位移传感器获得被测表面的高度信息,据此实现对被测表面形貌的测量;这种螺旋式扫描方法避免了栅格式扫描方法所存在的频繁加减速及反向运动间隙不足的问题,可提高系统的测量速度和精度。基于所搭建的测量系统,对表面形貌为凸凹扇形的圆形试件的表面进行了测量,结果表明：所提出的螺旋式扫描方法能够实现表面三维形貌的快速测量,测量试件表面上直径为Φ20 mm的区域时,所用时间仅为800 s,测量结果能较好地反映被测试件表面形貌的三维形貌。
A spiral scanning measurement system is proposed to achieve fast measurement of the planar surface of large-scale microstructure. The measurement system based on the proposed method, consisting of x, y, z linear motion platform, direct drive（DD） motor rotating around the z axis and laser displacement sensor. When moving the x and y platform, makes the beam of laser displacement sensor is coincidence with the rotating center of the DD motor. The z direction platform is adjusted to make the laser displacement sensor be located in the measuring range. The measured surface plane position information is obtained by spiral line, which is formed by synchronous motion of x platform and DD motor, Meanwhile, the measured surface height information is obtained by laser displacement sensor, thus, the measurement of three-dimensional topography is realized. This spiral scanning method prevents frequently acceleration, deceleration and backward movement gap of the grid scanning, which can improve the measuring efficiency and accuracy. Based on the measurement system, the surface of specimen with concave convex sector is measured, the results show that the proposed spiral scanning method can quickly measure the three-dimensional topography of the specimen surface. The total time of measuring the diameter of Φ20 mm area is only 800 s. The measurement results can well reflect the surface shape of the specimen three-dimensional topography.
作者
崔玉国
刘康
惠相君
马剑强
周鹏飞
Cui Yuguo;Liu Kang;Hui Xiangjun;Ma Jianqiang;Zhou Pengfei(Faculty of Mechanical Engineering ＆ Mechanics,Ningbo University,Ningbo 315211,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2018年第9期91-98,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51675288)项目资助
关键词
表面形貌
大面积测量
快速测量
螺旋扫描
激光三角法测量
surface topography
large-area measurement
fast measurement
spiral scanning
laser triangular measurement
