摘要
利用ANSYS有限元软件,对压力传感器波纹膜片的有关结构参数与力学性能的关系进行了分析:对均布载荷和集中载荷作用下,波纹膜片中心位移的有限元解与解析解进行了比较,验证有限元模型和结果的精度;根据ANSYS分析结果,对不同型面结构的波纹膜片,比较波纹形状对膜片力学性能的影响;讨论了正弦型波纹膜片的膜片厚度、波纹高度、波纹数目对其性能的影响,为波纹膜片结构的优化设计提供依据。
The corrugated diaphragm of pressure sensors which has isolated packaging structure, relationship between structural parameters and mechanical properties of the corrugated diaphragm are analyzed with ANSYS finite element software. Finite element numerical solutions and analytical solution are compared, results precsion and finite element model are verified. With ANSYS analysis results, effects of the diaphragm structures with different corrugated shapes on mechanical properties is compared. Aiming at sinusoidal corrugated diaphragm, effect of diaghragm thickness, wave height and ripple number on characteristics are studied in detail which can provide basis for the optimum design of corrugated diaphragm structure.
作者
刘亚伟
胡梦飞
杨露露
胡国俊
吕品
LIU Ya-wei;HU Meng-fei;YANG Lu-lu;HU Guo-jun;LU Pin(Institute of Industry and Equipment Technology,Hefei University of Technology,Hefei 230009,China;Mieroelectrouies Packaging Research Center,The 38th Research Institude,China Electronics Technology Group Corporation,Hefei 230000,China)
出处
《传感器与微系统》
CSCD
2018年第8期40-42,共3页
Transducer and Microsystem Technologies
关键词
压力传感器
波纹膜片
有限元分析
pressure sensor
corrugated diaphragm
finite element analysis
