摘要
在不锈钢基材表面利用等离子体增强化学气相沉积技术(PECVD)改变脉冲偏压制备不同结构类金刚石薄膜(DLC)。分别采用表面轮廓仪、扫描电镜、拉曼光谱及电子探针分析薄膜的表面粗糙度、断面形貌、薄膜结构及成分,采用纳米压痕仪及划痕仪测试薄膜的纳米硬度、弹性模量和膜基结合力,采用球盘摩擦试验机测试薄膜在大气环境中的摩擦学性能。结果表明:脉冲偏压显著影响PECVD制备的DLC薄膜的表面粗糙度、微观形貌、膜基结合力、纳米硬度及摩擦学性能;随偏压的增大,DLC薄膜的表面粗糙度,摩擦因数及磨损量都先减小后增大,而膜基结合力则先增大后减小。其中2.0 k V偏压制备的DLC薄膜具有最强的膜基结合力,而1.6 k V偏压制备的DLC薄膜具有最低的表面粗糙度、最高的硬度和最优的减摩耐磨性能。
The diamond-like carbon （DLC） films were prepared on the surface of 304 stainless steel by plasma en- hanced chemical vapor deposition （PECVD） technique with varying pulse bias voltages.The surface roughness,the cross- sectional morphology ,the structure and composition of the films were characterized by surface profilometer, scanning elec- tron microscopy, Raman spectrum and electron probe, respectively.The hardness and elastic modulus of the films were test- ed on a nanoindentor, and the corresponding adhesion forces between the film and substrate were investigated using a scratch tester.The tribological properties of the films were evaluated by a ball-on-disc tribometer.The results show that the DLC films are successfully prepared by PECVD technique and the applied pulsed bias voltages greatly affect the morpholo- gies, microstructures and mechanical properties of the as-prepared DLC films.With the increasing of the bias voltages, the surface roughness, friction coefficient and wear rate of the DLC film are decreased to a minimum value and then start to in- crease,while the adhesion force between the film and the substrate is increased to a maximum value and then slightly de- creased.The film prepared with 2.0 kV pulse bias voltage exhibits optimal adhesion force to the substrate.However, the film prepared with 1.6 kV bias voltage shows the smoothest surface and the highest hardness, resulting in superior friction reduction and wear resistance.
作者
陈国富
苏峰华
CHEN Guofu, SU Fenghua(School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou Guangdong 510641, Chin)
出处
《润滑与密封》
CAS
CSCD
北大核心
2018年第3期17-22,共6页
Lubrication Engineering
基金
广东省科技计划项目(2016A010102009)
广州市科技计划项目(201707010055)
关键词
脉冲偏压
DLC薄膜
力学性能
摩擦学性能
pulse bias voltages
DLC film
mechanical properties
tribological performance
