摘要
通过非平衡磁控溅射仪制备了不同Ag含量的ZrWN-Ag纳米复合膜,采用X射线衍射仪、扫描电镜、能谱仪、纳米压痕仪、摩擦磨损仪和三维形貌仪等对薄膜的微结构、成分、表面形貌、力学性能和室温及高温摩擦磨损性能进行表征,并探讨了复合膜在不同温度下的摩擦磨损机制.结果表明:ZrWN-Ag复合膜是由面心立方的ZrWN、W_2N和弥散分布的晶态Ag相组成.随着Ag含量增加,薄膜的硬度先增大后减小.室温下,薄膜的摩擦系数和磨损率随Ag含量增加而逐渐降低;温度由200℃升高至700℃时,薄膜摩擦系数逐渐降低,磨损率逐渐增大,温度一定时,Ag含量越高,复合膜的摩擦系数越低,但磨损率越高.研究表明:Ag的加入改善了薄膜力学性能、室温下的摩擦磨损性能以及高温下的摩擦性能,但高温下的磨损性能未得到改善.
ZrWN-Ag nanocomposite films with various sliver contents were deposited by reactive unbalanced magnetron sputtering. Their microstructure,morphology,mechanical and tribological properties were investigated by X-ray diffraction（ XRD）,scanning electron microscopy（ SEM）,energy dispersive spectrometer（ EDS）,nano-indentation and ball-on-disk tribometer. The tribological mechanism at different temperatures was discussed. The results indicated that ZrWN-Ag thin films have a fcc crystal structure and no Ag diffraction peaks were found. With the increase of Ag content,the hardness of films increased first and then decreased. At room temperature,the friction coefficients and wear rate of ZrWN-Ag films decreased gradually with increasing Ag content. When the temperature reached 200 ~ 700℃,the friction coefficient of ZrWN-Ag films mainly decreased and the wear rate increased gradually. When the temperature was constant,the higher the content of Ag was,the lower the friction coefficient and the higher the wear rate. This study showed that the addition of Ag improved mechanical,friction and wear properties of the films at room temperature and the tribological property at high temperature,but the wear property at high temperature was not improved.
出处
《江苏科技大学学报（自然科学版）》
CAS
北大核心
2017年第4期433-438,共6页
Journal of Jiangsu University of Science and Technology:Natural Science Edition
基金
国家自然科学基金资助项目(51574131
51374115)
江苏科技大学研究生创新计划(YCX13S-32)
关键词
磁控溅射
ZrWN-Ag复合膜
力学性能
摩擦磨损性能
magnetron sputtering
ZrWN-Ag nanocomposite films
mechanical property
tribological property
