摘要
本文扼要介绍了现阶段国内外用于研制微型机械的主要方法，着重介绍了激光光刻成型法的基本原理、制作微型机械的工艺途径、技术特色及其应用前景。
The machining methods and technology of micro-machines currently applied in the worldare briely introduced foundamental princile of Iaser photoforming technology and itsapplication in machining of micromachines are presented.The paper also looks into its futureresearch and application trends.
出处
《光学精密工程》
EI
CAS
CSCD
1995年第2期11-15,共5页
Optics and Precision Engineering
基金
中国科学技术大学青年基金
