摘要
为了实现高精密温度测量,设计了高性能数字温度传感器,该传感器由石英音叉谐振器,数字接口电路和基于现场可编程门阵列的传感器重置控制算法构成。依据石英晶体压电效应原理,对石英音叉谐振器的热敏切型和电极设置进行了研究;基于力学振动原理,导出石英音叉谐振器弯曲振动模式的微分方程;讨论了谐振式温度传感器的工作原理,提取出石英音叉温度传感器的特征参数并进行了非线性误差分析;采用光刻和侵蚀技术加工制作了石英音叉谐振器。该传感器的频率输出信号通过数字接口进入现场可编程门阵列,通过重置控制算法实现传感器的重置和现场自动校验。实验结果表明,在-20 ～140 ℃,该传感器的灵敏度可达65×10-6/℃,测温分辨率为0 .001 ℃,响应时间为1 s ,测温精度为0 .01 ℃。
In order to measure temperature in high-precision, a high-performance and fully digital smart temperature sensor is designed, which comprises a quartz tuning fork resonator,an interface with Complementary Metal Oxide Semiconductor （COMS） and a controlling algorithm for sensor reconfiguration based on the Field Programmable Gate Array（FPGA）. According to the piezoelectricity effect of a quartz, the thermosensitive cut for the quartz tuning fork resonator and the electrode configuration are analyzed,and the resonant differential equation of the quartz resonator working in a flexural vibrating mode is derived from mechanical vibration. Then,the design principle for the quartz tuning fork temperature sensor is discussed,and the characteristic parameter of temperature sensor is extracted. Finally, the nonlinear error of the sensor is analyzed. The quartz tuning fork resonator is fabricated by a photolithography and an etching technology, in which the frequency output is from the interface IC to FPGA and the special controlling algorithm may easily realize the sensor reconfiguration and the automatic calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach 65×10^- 6 ℃ at the temperature ranges from -20 ℃ to 140 ℃, which guarantees the precision of 0.01 ℃, the resolution of 0. 001 ℃, and the response time of 1 s.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2009年第6期1453-1459,共7页
Optics and Precision Engineering
基金
Supported by the Special Research Fund for the Doctoral Programof Higher Education (Grant No.200802140005)
Harbin Science Technology Innovation foundation (Grant No.2007RFQXG054)
