摘要
比对法漏率校准装置是计量气体漏率的一种装置 ,可绝对法和相对法对真空漏孔进行校准。绝对法的校准范围为 10 - 4～ 10 - 9Pa· m3/s;相对合成标淮不确定度为小于 10 %。相对比对法的校准范围为 10 - 6～10 - 1 0 Pa· m3/s,相对合成标准不确定度为小于 2 5 %。
The calibration apparatus of comparison leak rate method is a metrology standard apparatus for gas leak rate. The vacuum leak can be calibrated with the absolute comparison method and the relative comparison method. The absolute method is 10 4 ～10 9 Pa·m 3/s, and the comparative compound standard uncertainty is less than 10%. The relative comparison method is 10 6 ～ 10 10 Pa·m 3/s, and the comparative compound standard uncertainty is less than 25%.
出处
《真空》
CAS
北大核心
2002年第4期14-17,共4页
Vacuum
