摘要
介绍了标样气体进样系统配样、进样及校准原理,以及采用单一气体和混合气体对系统性能进行了研究,给出了灵敏度*和相对灵敏度随进样室压力变化的曲线,并对试验结果进行了分析和讨论。
The working principle of the reference gas intake system we developed are introduced, including gas proportioning, intaking and calibrating processes. Single gas and some mixed gases were tested to investigate the performance of the system, thus giving relevant relationships of sensitivity to intake chamber pressure. Testing results are discussed with some conclusions drawn.
出处
《真空》
CAS
北大核心
2004年第6期33-39,共7页
Vacuum
