摘要
为了避免应用外部传感器,采用自感知方式实现压电微夹钳的闭环控制.压电微夹钳钳指在电压与外力作用下输出位移并在其表面产生电荷,据此提出了基于电流积分的钳指位移自感知方法;将PID控制器中的矩形积分改为抛物线积分,对偏差的微分改为对输出的微分,设计出了压电微夹钳的改进PID控制器,并将其同自感知反馈方式相结合,设计出了压电微夹钳的自感知反馈控制系统.实验结果表明：在自感知反馈控制作用下,压电微夹钳对5μm阶跃参考位移的响应时间为0.34 s,若不考虑噪声影响,稳态误差几乎为零;在最大位移为14.1μm的任意波形参考位移的作用下,压电微夹钳的自感知反馈控制亦可取得良好的控制效果,其稳态误差中线在-0.06~0.05μm之间变化.
In order to avoid using an external sensor,a self-sensing method is adopted for the closed-loop control of the piezoelectric micro-gripper. The finger of piezoelectric micro-gripper generates displacement and charges on its surface under voltage and external force,based on which a displacement self-sensing method based on the current integral was developed. Then,an improved PID controller for the piezoelectric micro-gripper was designed. In this method,parabolic integral was used instead of rectangular integral,and the differential of the output replaced that of the deviation. Furthermore,the PID control method combined with the self-sensing feedback was designed. Experimental results show that the response time of the micro-gripper is 0. 34 s at a desired step signal of 5 μm for the self-sensing feedback control.The steady state error is almost zero without considering the influence of noise. The self-sensing feedback control can achieve good results for the piezoelectric micro-gripper in an arbitrary waveform with maximum displacement of 14. 1 μm,with the average steady state error within- 0. 06 —0. 05 μm.
出处
《纳米技术与精密工程》
CAS
CSCD
北大核心
2016年第2期118-123,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(51175271)
浙江省高等学校中青年学科带头人学术攀登计划资助项目(pd2013091)
关键词
压电微夹钳
自感知反馈
PID控制
piezoelectric micro-gripper
self-sensing feedback
PID control
