摘要
介绍了工作频率在约为10GHz的UHF频段,可产生梳谱信号的高次谐波声体波谐振器(HBAR)的原理、设计和制作工艺方法。设计了Au/Cr/ZnO/Au/Cr/YAG/Cr/Au/ZnO/Cr/Au双端结构的谐振器,试验样品在谐振频率2.240 137GHz的品质因数(Q)值达到23 000。进一步开展氧化锌成膜工艺技术的研究,实现对HBAR设计修正,提升器件的Q值。
The principle,design and fabrication process of the high overtone bulk acoustic resonator（HBAR）which can generate the comb-spectrum signal with the operating frequency of about 10 GHz at UHF band are presented in the paper.Also,the resonator with Au/Cr/ZnO/Au/Cr/YAG/Cr/Au/ZnO/Cr/Au two-port structure is designed,and the Qvalue of experimental sample is more than 23 000 at the resonance frequency of 2.240 137 GHz.The future work will focus on ZnO film growth,HBAR design modification and Qvalue improvement.
出处
《压电与声光》
CAS
CSCD
北大核心
2015年第6期999-1002,共4页
Piezoelectrics & Acoustooptics
