摘要
介绍一种具有纳米级测量灵敏度的非接触光探针平整度测试仪 ,其分辨率优于 1nm。这种测试仪在电子玻璃、半导体、集成电路、薄膜和纳米技术等领域都有很大的应用前景。给出了该测试仪在液晶显示器件基板表面形状研究方面的一些应用的实验测试数据结果 。
A kind of flatness tester with noncontact light probe is introduced. It has the accuracy of nanometer, with a resolution of 1 nm, and measuring range of 10 μm. This kind of tester shows a great practical prospect in the applications of electronic glass, semiconductor, integrated circuit, thin films and technology of nanometer. Some of the testing results in the study of liquid crystal device (LCD) substrate surface shapes by the tester are presented and the results indicate that this kind of tester can be used in LCD study and play an important role in it.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2002年第7期863-866,共4页
Acta Optica Sinica
