摘要
本文提出了一种利用电子散斑干涉法(ESPI)检测漫射表面三维轮廓的新方法。并应用该方法具体测量了斜面、柱面和球面三种不同形状的表面轮廓。文中介绍了检测光路,推导了计算公式,讨论了测量灵敏度的调节问题。最后,还就实验误差、该方法的优点和不足进行了分析。所有相关条纹图和实验数据,均由交互式高速图像处理系统和微机进行处理和分析。
sensitivity A new method for the inspection of three--dimensional contour of a diffusely ref-lecting object using Electronic Speckle Pattern Interferometry (ESPI) is presented.The method was applied to contour measurement of three different surfaces, an inc-lined plane, a part of cylindrical surface and a part of spherical surface.The opticalarrangement is described, calculating equations derived and the contro1 of measuringsensitivity discussed.Finally, the sources of error, advantages and limitationsof the technique are discussed.Correlation fringe patterns and experimental datawere processed and analysed by a pc--based interactive high--speed image processingsystem.
出处
《量子电子学》
CSCD
1991年第2期254-262,共9页
基金
国家自然科学基金
关键词
表面形状
三维轮廓
测量
ESPI
ESPI
3D contour
inspection of shape
height distribution
