摘要
本文简述了用真空集热管磁控溅射镀膜机铁制不锈钢－碳／铜选择性吸收涂层的结果。讨论了镀膜机的吸收管布置问距，涂层光学性质的均匀性等问题，并提出了改进的途径。
The results of stainless steel-carbon/coppor selective aurface produced by using magnetron sputtering system for coating. batches of tubes is briefly presented. Problems of the coater arc discussed about absorber tube spacing. uniformity of coating optical propertie and so on.The imethods improved are suggested.
出处
《真空》
CAS
北大核心
1991年第2期50-54,共5页
Vacuum
