摘要
用磁控溅射镀膜技术镀制太阳能集热管的涂层研究结果表明 ,用单一的铝靶极及氮气、乙炔气体等材料 ,经直流反应和非反应溅射 ,在玻璃管上镀制 α- C∶ H/Al- N/Al选择性吸收涂层 ,其太阳吸收比 αS=0 .93～0 .94 ,半球向发射比 εh=0 .0 7～ 0 .0 8,与 Al- N/Al选择性吸收涂层相比 ,反应溅射阶段镀膜时间缩短了 5 9%。
The study results of the coating deposited onto solar energy tubes collectors with magnetron sputtering coating technology are given in this paper. Solar selective absorbing surfaces of α C∶H/Al N/Al on glass tubes were produced with absorplance α S =0.93～0.94 and hemispherical emittance ε h=0.07～0.08 by DC reactive and non reactive sputtering with a single aluminum cathode, nitrogen, acetylene materials, etc. The α C∶H/Al N/Al selective surfaces are 59% of coating time in reactive sputtering less than Al N/Al selective surfaces.
出处
《真空》
CAS
北大核心
2001年第6期29-32,共4页
Vacuum
