摘要
采用低压等离子体化学气相沉积 (LPP CVD)并结合反弹盘方法在靶球表面涂敷厚的CxH1-x涂层。使用反式 2 丁烯为工作气体的沉积速率相对较慢 ,最高为 1μm/h ,而使用苯乙烯时 ,沉积速率提高到 3～ 4μm/h。结合反弹盘技术 ,在塑料微球上涂敷了厚度为 5 0～ 80 μm的CxH1-x涂层 ,涂敷薄膜的表面均方根粗糙度小于 5 0nm。
The technical conditions of coating CH film on the polymer micro spherical shell surface are studied by low pressure plasma chemical vapor deposition(LPP CVD). The results show that the styrene is better than trans 2 butene as working gas, and the deposition rate is about 3～4 μm/h for styrene, 1 μm/h for the trans 2 butene. Combined with the bouncing pan method, the coating of C x H 1- x film with the thickness of 50～80 μm and the mean smoothness of 50 nm on the polymer micro spherial shell surface is carried out.
出处
《原子能科学技术》
EI
CAS
CSCD
2002年第4期343-347,共5页
Atomic Energy Science and Technology
基金
国家"8 63"惯性约束聚变领域资助课题 (863 41 6 3 3 2 )
