摘要
采用XRD ,SEM ,Raman光谱仪等分析检测手段 ,研究了YG1 5硬质合金基体经表面二步法浸蚀后 ,在其表面用热丝法沉积出的金刚石薄膜的晶体结构、组织及化学纯度等。结果表明 :硬质合金基体表面一定深度范围内Co含量的变化 ,对金刚石薄膜的晶体结构取向、组织形态及化学纯度等有很大影响。CVD沉积温度从 90 0℃降至 80 0℃ ,后一温度下的金刚石薄膜的晶粒尺寸是前一温度下的 15 。沉积温度降低至 70 0℃左右时 。
The morphology,texture and chemical quality of HF CVD diamond films on WC-15%Co substrates which were pretreated by a two-step etching method were investigated by means of XRD,SEM and Raman spectrum. The results indicated that the Co contents within the etching depth of 5 μm had great affections on the texture transformation, morphology transformation and changes in chemical quality of the diamond films. The diamond film grain sizes became 5 times smaller when the deposition temperature was decreased from 900 ℃ to 800 ℃. The chemical quality of diamond coatings was very poor when the deposition temperature below 700 ℃.
出处
《矿冶工程》
CAS
CSCD
北大核心
2002年第2期114-116,共3页
Mining and Metallurgical Engineering
基金
湖南省科技厅攻关项目 (0 0GKY1 0 0 7)
关键词
金刚石薄膜
硬质合金
组织
结构
diamond coatings
cemented carbides
morphology
texture
