摘要
显微系统的自动调焦是实现高精度测量的重要技术。采用偏心光束法,以半导体激光器作为光源,激光束与主光路光轴偏心入射到显微系统中,离焦引起反射光位置改变而获得离焦信息,用二象限硅光电池接收,光电信号经差分放大、微机处理、功放后,驱动直流电机拖动微动工作台进行离焦量补偿,从而实现显微系统的自动调焦。实验结果表明:在离焦1000μm 范围内,达到±0.1μm 精度。
The autofocus technique of microscope is vital to high precisi-on measurement.The present eccentric light beam method uses a semiconduct-or laser device as the light source.the laser beam which enters into the mi-croscope system is eccentric with the main light axis.Adefocusing signal isacquired for the change of the reflected light position caused by defocusing,and is deflected by a dual-quadrant photo cell.After being differentially am-plified,processed by a microprocessor and power-amplified,the opto-electricsignal drivesa D.C motor,which moves a fine stage to an automatic focus ofthe microscope.The result of the experiments shows a ±0.1μm pricision of au-tofocus for a range of 1000μm defocusing.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1991年第1期76-83,共8页
Chinese Journal of Scientific Instrument
基金
机械委基金
