摘要
根据叉指换能器等效电路模型,用阻抗法测量了五氧化二钽(Ta_2O_5)压电薄膜的声表面波(SAW)机电耦合系数和速度,用电压法测量了频率温度系数,并对其测量误差进行了分析。
According to the equal circuit model of interdigital transducer, the SAW electromechanical coupling coefficient and velocity of piezoelectric Ta2Os film are measured using impedance method. The temperature coefficient of frequency is also measured using voltage method. Then, the analysis of the measured errors has been made.
出处
《压电与声光》
CSCD
北大核心
1991年第6期44-47,共4页
Piezoelectrics & Acoustooptics
