摘要
声表面波器件作为一种新型的电子器件 ,近年来引起了人们极大的关注 ,在科学研究领域有了较大的进展 ,在现代无线通讯领域的应用范围日趋广泛。本文简述了目前国际上出现的声表面波器件的制备方法、性能研究及其应用 。
Recently,high frequency surface acoustic wave (SAW) devices have attracted considerable attention because of its many strengths in telecommunication.Much effort has been focussed on developing GHz band SAW filters.The latest progress on SAW devices was reviewed.
出处
《真空科学与技术》
CSCD
北大核心
2001年第5期376-380,共5页
Vacuum Science and Technology
