摘要
对国内外微电子技术配套专用超净高纯试剂进行了评述
The actuality,application field,preparation technologies,related assistant technologies and future development trend of Ultra clean and high pure chemical reagents used in micro electronic industries are reviewed.
出处
《化学试剂》
CAS
CSCD
北大核心
2002年第3期142-145,共4页
Chemical Reagents
关键词
超净高纯试剂
应用
制备
湿法清洗
半导体
刻蚀
Ultra clean and high pure chemical reagents
actuality
application
preparation
assistant technology
