摘要
随着微机电系统的快速发展 ,对微装配技术的需求日益迫切。详细地综述了近年来微装配技术发展的几个主要方面 ,包括微装配机理、视觉伺服微装配的结构、微夹持器等等。
Microassembly technology is increasingly required with the rapid development of microeletromechanical system (MEMS). In this paper, some main issue involved in microassembly are surveyed including the mechanics of microassembly, visual servoing frameworks for microassembly, design of micro-endeffectors and so on. In the end of paper, some issues about future focus in our point are also presented.
出处
《电子机械工程》
2002年第1期35-37,共3页
Electro-Mechanical Engineering