摘要
利用国内第一台金属蒸汽真空弧(MEVVA)离子源引出的钼离子对H13钢进行了不同束流密度下的注入。根据以碰撞和扩散理论为基础的YJH1程序计算了钼在H13钢中的分布。背散射(RBS)证明了这种计算的合理性。电镜(TEM)分析表明:随着束流密度的增大,注入层内将有钼化物出现。最后讨论了析出的钼化物对杂质浓度深度分布的影响。
Mo ions of various current densities extracted from the national first MEVVA ion source were implanted into Hl3 steel. YJH1 program on the basis of diffusion and collision theories was used to calculate the profile of Mo implanted in H13 steel. RBS proved that the calculation was reasonable. The analysis with TEM shows that as the beam current density increases the compounds of Mo could be observed in the implanted layers. Finally, the influence of precipitated Mo-compounds on the profile of Mo concentration in depth was discussed.
出处
《微细加工技术》
1991年第4期32-38,共7页
Microfabrication Technology
基金
863基金资助
