摘要
提出了一种差动电容式传感器的前置电路 ,基于电容 /电压转换的原理 ,对微小电容变化量进行测量。电路输出的直流电压与差动电容变化量成线性关系 ,且能对偏差电容和电路的漂移进行自动补偿。实验表明 ,被测电容分辨力为 8fF ,灵敏度可达 3.82× 10 11V/F。
A prepositive circuit for differential capacitance transducers is proposed.It can be used to detect small capacitance changes based on capacitance to voltage conversion. The output dc voltage is a linear with the complementary capacitance change and can be used to compensate for offset capacitance and drifts automatically. The experiment results show a good correspondence with the theoretical analysis. The resolution of the measurement of capacitance change is 8?fF,and sensitivity is 3.82×10 11 ?V/F.
出处
《传感器技术》
CSCD
北大核心
2002年第4期40-42,共3页
Journal of Transducer Technology
关键词
电容式传感器
差动线性电路
电容/电压转换
capacitive transducer
low capacitance measurement
linear circuit
capacitance/voltage conversion
