摘要
论述了哈特曼夏克传感器的测量原理 ,对它的测量精度进行了标定。同时还介绍了哈特曼夏克传感器在光学车间实际测量大口径非球面系统的情况 。
The principle of a Hartmann-Shack sensor is introduced. The influence factors for measured accuracy are analyzed. The measurement of using Hartmann-Shack sensor for aspherical system in optics workshop is described. It shows that Hartmann-Shack sensor is an effective means for optics workshop measurement.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2002年第4期491-494,共4页
Acta Optica Sinica
基金
国家 8 6 3高技术资助课题