摘要
用等效电路的方法研究了点阴极情况下的电场辅助阳极连接效应 ,计算了连接电流、连接孕育期和紧密接触面积。本文结果表明 ,连接初期电流迅速衰减 ,随后缓慢变小 ,直至某一稳定值 ;孕育期随温度上升指数下降 ,连接温度高时 ,孕育期将难以观察到 ;待连接表面之间紧密接触面积随时间延长而非线性扩展 ,紧密接触区域增大时 ,其边界向外推进速度渐小 。
Effects of point cathode anodic bonding are theoretically investigated by using electrical circuit analog. The bonding current, incubation period and intimate contact area are calculated. The results show that the current decays rapidly at early stage during anodic bonding and then decreases slowly; the incubation period falls off exponentially as the bonding temperature is raised; the intimate contact area spreads nonlinearly with time.
出处
《电子器件》
CAS
2002年第1期37-40,共4页
Chinese Journal of Electron Devices
基金
国防预研基金 (编号 :99J43 .3 .13 )资助
关键词
点阴极
等效电路
电流
紧密接触面积
电场
阳极连接
cathode
electrical equivalent circuit
electrical current
intimate contact area
incubation period.
