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用新局域模型计算高Z靶的溅射产额 被引量:1

CALCULATIONS OF SPUTTERING YIELD OF HIGH Z MATERIALS TARGET USING A NEW LOCAL MODEL
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摘要 用ACAT模拟程序计算了不同离子碰撞在单原子材料上的溅射产额。计算中采用山村等人提出的包括壳效应的新电子能量损失局域模型 ,原子间作用势使用Moli啨re势?扑愕玫降慕峁胧笛槭莺蜕酱宓鹊木楣浇斜冉?。 The sputtering yields due to various ion impacts on monatomic materials are calculated using the ACAT code.Moliére potential as interatomic potential and the new local model of the electronic energy loss,including shell effect, which was advanced by Yamamura, have been used in the calculation.The calculation results are consistent with experimental data and the result of Yamamura′s empirical sputtering formula.
出处 《核聚变与等离子体物理》 CAS CSCD 北大核心 2002年第1期57-60,共4页 Nuclear Fusion and Plasma Physics
基金 国家留学基金回国科研资助费资助项目 (留金法 [1999]5 0 0 3号 )
关键词 蒙特卡罗模拟 溅射产额 电子能量损失局域模型 原子间作用势 高工靶 离子溅射 计算 聚变堆材料 Monte Carlo simulation Sputtering yield Local model of the electronic energy loss Interatomic potential.
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参考文献10

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