摘要
使用ACAT模拟程序计算了不同离子碰撞在单原子材料上的溅射产额 .采用山村等人提出的考虑壳层效应的理论屏蔽长度 ,原子间作用势用Moli啨ｒｅ势 .并将计算结果与实验数据和山村等的经验公式进行了比较 .
The sputtering yields due to various ion impacts on monatomic materials are calculated with the ACAT code.As the interatomic potential,Moliére potential is used in the simulation,and the theoretical screenging length is adopted which was advanced by Yamamura to include shell effects.The calculation results are consistent with experiment data and Yamamura's empirical sputtering formula.
出处
《计算物理》
CSCD
北大核心
2002年第4期290-292,共3页
Chinese Journal of Computational Physics
基金
国家留学基金回国科研资助费 (留金法 [1999] 5 0 0 3号 )资助项目
