摘要
采用脉冲激光沉积 (PLD)法分别在硅和玻璃基片上沉积了 Ni Zn铁氧体多晶薄膜。实验表明 :基片温度、氧气压以及热处理对薄膜的沉积速率。
Polycrystalline films of NiZn ferrite were deposited on crystal Si and glass substrate by pulsed laser deposition(PLD). The experiments showed that substrate temperature, oxygen pressure and annealing process have great influence on deposition rate and magnetic properties of NiZn ferrite film.
出处
《磁性材料及器件》
CAS
CSCD
2001年第6期9-13,共5页
Journal of Magnetic Materials and Devices
